A very unusual side effect of the move to 3D NAND will be the impact on the equipment market. 3D NAND takes the pressure off of lithographic steps and focuses more attention on deposition and etch. The reason for going to 3D is that it provides a path to higher density memories without requiring lithographic shrinks.
This is bad news for stepper makers like ASML, Canon, and Nikon while it will be a boon to deposition and etch equipment makers like Applied Materials, Tokyo Electron, and Lam Research.
In its summer 2013 V-NAND announcement, Samsung explained that it would be Continue reading
The answer is: “There is no such thing: It’s a misstatement.”
The term “MLC” has, by a number of people, been mistranslated to “multi-layer cell.” The misunderstanding appears to have originated in the financial community. People in the flash memory business never use the term at all.
Yes, we talk about MLC, but to us the term means “multilevel cell”.
A multilevel cell is a cell that uses varying voltage levels to represent different states. With four voltage levels the resulting four states on a single cell can be turned into Continue reading
In a word: No.
(Before I get too far into this allow me to admit that The Memory Guy doesn’t understand quantum physics, so I will be presenting this only to the depth that I understand it. There will be no band-gap diagrams or equations to wrestle with.)
Both 3D NAND and planar NAND use Fowler Nordheim Tunneling (FN) to both program and erase. This differs from NOR flash which programs bits using Continue reading
A prior post in this series (3D NAND: Making a Vertical String) discussed the difficulties of successfully manufacturing a charge trap flash bit. Still, Spansion, and now other flash makers, have determined to take this route. Why is that?
In Spansion’s case, a charge trap was a means of doubling the bit capacity of its products. It was an inexpensive alternative to standard MLC flash. To date this strategy has worked very well.
As mentioned in that earlier post, 3D NAND uses a charge trap because it’s extremely difficult to create features, like a floating gate, sideways – lithography works from the top down. A charge trap, when used to replace a floating gate, doesn’t need to be patterned, since the Continue reading
One of the thornier problems in making 3D NAND is the job of connecting the peripheral logic (the row decoders) to all of those control gates that are on layers buried somewhere within the bit array. Remember that the control gates are the conductive sheets of polysilicon or tantalum nitride at various depths in the chip.
The problem boils down to this: You can’t run connections from each layer up or down the side of the chip to get to the CMOS circuits below. Instead you have to create a terrace structure to expose and connect to each layer.
These connections are made by etching a stair-step pattern into the layers and sinking Continue reading
The Kyoto Prize, one of the world’s most prestigious accolades, is an international award bestowed once a year by The Inamori Foundation to honor those who have contributed significantly to the scientific, cultural and spiritual betterment of humankind. Some say it is similar to the Nobel Prize, and seven Kyoto Prize laureates have gone on to win the Nobel Prize.
In addition to the kudos of receiving this honor, Denning was also Continue reading
My prior 3D NAND post explained how Toshiba’s BiCS cell works, using a silicon nitride charge trap to substitute for a floating gate. This post will look at an alternative technology used by Samsung and Hynix which is illustrated in the first graphic, a diagram Samsung presented at a technical conference. This cell also uses a charge trap.
Let The Memory Guy warn you, if the process in my prior post seemed tricky, this one promises to put that one to shame!
Part of this stems from the use of a different kind of NAND bit cell. You can shrink flash cells smaller if you use a high-k gate dielectric (one with a high dielectric constant “k”) since it Continue reading
Let’s look at how one form of 3D NAND is manufactured. For this post we will explore the original design suggested by Toshiba at the IEEE’s International Electron Device Meeting (IEDM) in 2007. It’s shown in the first graphic of this post. (Click on any of the graphics for a better view.)
Toshiba calls this technology “BiCS” for “Bit Cost Scaling.” The technique doesn’t scale the process the way the world of semiconductors has always done to date – it scales the cost without shrinking the length and width of the memory cell. It accomplishes this by going vertically, as is shown in this post’s first graphic.
This takes a special effort. This is where the real Continue reading
In the prior post we discussed the need to go vertically into the body of the die, since NAND flash can not be scaled much farther in length and width on the die’s surface. Toshiba invented a 3D NAND which has been adopted and refined by all flash makers. The idea is simple: Rather than shrink the cell’s length and width, why not turn the NAND string so that it’s standing on its end?
This concept is illustrated by this post’s first graphic, which was provided by Applied Materials. (Click on the graphic to see the whole thing at a larger size.) A standard NAND string that normally runs longitudinally is turned on its end to become a vertical string. Not only that, but it makes things easier if the string is split into two sections and Continue reading
During the Flash Memory Summit last August Facebook’s Jason Taylor, Director of Capacity Engineering and Analysis, asked for a flash chip with dramatically lower cost per gigabyte, saying that he would readily give up speed and endurance to achieve this lower cost. Taylor called this “Cold Flash” and said he was willing to use something that was “Write Once, Read Many” or WORM for data that was unlikely to change over its lifetime. He said this was Facebook’s “Ask of the Industry.”
That same sentiment was echoed yesterday at Samsung’s Memory Solutions Forum by eBay’s Distinguished Engineer and Technologist Roark Hilomen, who said that he could live with 1/3rd the number of writes that normal flash supports as long as he could get it for 1/4 the price.
Unfortunately this is simply not possible.
Let’s do a little math to understand Continue reading