New Book: Vertical 3D Memory Technologies

Book: Vertical 3D Memory Technologies - Betty PrinceWiley has recently published a new book by Betty Prince titled Vertical 3D NAND Technologies that is one to consider if you want to bring yourself up to speed on recent research behind today’s and tomorrow’s 3D memory technologies.

For those who haven’t previously encountered Dr. Prince, she is the author of a number of key books covering memory design and holds memory patents written over her 30-year career in the field.

The book provides capsule summaries of over 360 papers and articles from scholarly journals on the subject of 3D memories, including DRAM, NAND flash, and stacked chips.

These papers are organized into sections of related technologies to provide an invaluable reference for those who wish to locate all the relevant research on a particular 3D technology.  Chapters cover the history leading towards 3D memory, early stacked structures, Gate-All-Around structures (including those used for 3D NAND), vertical NAND flash (discussed in a Memory Guy blog series), 3D cross-point arrays (which will be important in future replacements for NAND flash), and 3D TSV stacks.

It’s a useful tool for locating research covering any of the numerous 3D technologies that are now finding their way into early production.  I recommend it to anyone who needs to quickly locate published papers covering any 3D memory technology.

4 thoughts on “New Book: Vertical 3D Memory Technologies”

  1. iam phD student who wrking in ReRAM area. Can you please advice me with note and more fundamental about reram memory

    1. Mabkhoot, Thanks for the comment.

      I don’t know of any good tutorials on ReRAM, but there are several slideshows about the technology on the Flash Memory Summit website ( and Betty Prince has just published a useful book with a lot of ReRAM information: “Vertical 3D Memory Technologies” Wiley.

      Good luck with the studies.


  2. Hi Jim. Thanks for the helpful articles and links. Everybody seems to be talking about etching and deposition challenges for fabricating 3d nand. But I could not find papers or articles about how exaclty are samsung or other companies accomplishing the high aspect ratio etching for 3d v nand. Can you guide me to some good links/papers.

    Thank you

    1. I don’t believe that they are telling anyone how they do this. Sorry!

      Perhaps the etching tool makers could help. Applied Materials told me, when I was writing this, that their tool was certified to a 40:1 ratio but that they were certain that it could go to at least 60:1.


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