Stair Step

How Samsung Will Improve 3D NAND Costs

Samsung's New Stairstep Etch iOne of the most intriguing revelations during the Flash Memory Summit two weeks ago was Samsung’s new approach to stairstep etch in 3D NAND.  This was one of numerous innovations the company’s  EVP of Flash Products & Technologies, Kye Hyun (KH) Kyung, shared during Samsung’s Tuesday Morning keynote presentation.

The Memory Guy would point readers to the pdf of Samsung’s presentation on the Flash Memory Summit website, but it isn’t there, and it’s unlikely to ever be posted there.  Samsung seems to have a policy that prohibits sharing such presentations.

Although I was unable to get a copy of the drawing that the keynoter used, I have tried to re-create it using, of all things, Excel!  The result is the graphic for this blog post.  The only thing I was unable to easily recreate was the different colors representing the layers of the 3D NAND.  You’ll need to use your imagination and envision layers of two colors, with all the surfaces exposed on the top being the same color, but at different layers of a 64-layer structure.

Today’s common approach to 3D NAND’s stairstep is to etch a simple step pattern in one dimension, which I illustrated in an early 3D NAND blog post four years ago.  This is a challenging Continue reading

3D NAND: How do You Access the Control Gates?

Samsung's TCAT NAND Flash Wordline COnnectionsOne of the thornier problems in making 3D NAND is the job of connecting the peripheral logic (the row decoders) to all of those control gates that are on layers buried somewhere within the bit array.  Remember that the control gates are the conductive sheets of polysilicon or tantalum nitride at various depths in the chip.

The problem boils down to this: You can’t run connections from each layer up or down the side of the chip to get to the CMOS circuits below.  Instead you have to create a terrace structure to expose and connect to each layer.

These connections are made by etching a stair-step pattern into the layers and sinking Continue reading